Huzhou Pulim Semiconductor: A deep player in the field of semiconductor precision transfer

In the entire process of semiconductor manufacturing, the precise handling, alignment, and transfer of wafers constitute one of the core links that determine process yield. Huzhou Pulim Semiconductor Co., Ltd., located in Changxing County, Huzhou City, Zhejiang Province, is precisely a specialized and proficient enterprise focusing on this track. Relying on localized science and technology innovation industry support, and centering around the precise transfer needs of semiconductor production processes, it has created a product matrix covering core components to complete systems.

Semiconductor manufacturing has stringent requirements for the precision, stability, and cleanliness of wafer handling. As the core carrier in the wafer transmission process, wafer handling robots need to complete high-speed, collision-free transfer of wafers between different process stations in a clean environment of Class 100 or higher. Huzhou Prim Semiconductor's wafer handling robot products adopt lightweight structural design and high-precision motion control algorithms, capable of adapting to the transmission needs of mainstream wafers ranging from 6 inches to 12 inches. While ensuring operational speed, they maintain repeatable positioning accuracy at the micrometer level, effectively avoiding issues such as wafer fragments and surface scratches during handling, providing reliable support for smooth transitions in front-end processes such as lithography, etching, and thin film deposition.

As a core supporting component in the lithography process, the performance of the wafer alignment stage directly affects the overlay accuracy of multi-layer circuit patterns. The wafer alignment stage launched by Huzhou Pulim Semiconductor integrates high-precision displacement control and real-time visual feedback technology, enabling it to cooperate with the production line to complete the pre-alignment and fine alignment processes of wafers. It maintains stable alignment performance even under complex workshop conditions, helping the production line to stably control the alignment accuracy within the process requirements and meet the lithography alignment needs at different stages from mature processes to advanced processes. The entire alignment stage adopts a modular design concept, allowing flexible adjustment of parameters according to the integration requirements of different equipment manufacturers, significantly reducing the supporting and adaptation costs for semiconductor equipment manufacturers.

In the field of end-effectors that come into direct contact with wafers, ceramic fork tips are widely recognized as a high-reliability choice within the industry. Traditional metal wafer forks are prone to issues such as surface wear and debris shedding during long-term use, which may contaminate the wafer surface. Ceramic fork tips made from high-performance ceramic materials, with their characteristics of high hardness, low deformation, and high cleanliness, perfectly address this pain point. The ceramic fork tips from Huzhou Pulim Semiconductor, after precision machining and surface polishing, exhibit excellent insulation and wear resistance. They do not generate particulate contamination even when used in a clean environment for extended periods. They can efficiently cooperate with wafer handling robots to smoothly lift the edges of wafers, significantly extending the lifespan of end-effectors and reducing the frequency of production line maintenance.

By deeply integrating core components such as wafer handling robots, wafer alignment stages, and ceramic wafer forks, a wafer transfer system that covers the entire wafer process is formed. The integrated wafer transfer system launched by Huzhou Prim Semiconductor is not a simple combination of multiple components, but achieves collaborative operation of various modules through a unified control architecture. It can automatically complete the entire process of wafer loading, pre-alignment, station transfer, position calibration, unloading, etc. The entire system is equipped with comprehensive status monitoring and abnormal warning functions, and can be seamlessly integrated into mainstream semiconductor manufacturing lines. It helps customers improve the automation level of wafer transfer processes and reduce the uncertainty brought by manual intervention.

From independent research and development of core components to the integration and implementation of complete systems, Huzhou Pulim Semiconductor, relying on its technological accumulation in the field of semiconductor-specific equipment, is making solid contributions to the localization of the domestic semiconductor equipment industry chain. In the future, as the semiconductor manufacturing process demands increasingly higher precision in transfer, the company will continue to delve deeper into precision motion control, high-performance material applications, and other directions, launching more transfer solutions that meet advanced manufacturing needs.