Product Features: 

Employing high-precision air-floating guide rails with a 320mm large-diameter hollow rotating motion 

Nanometer-level flatness and straightness 

The self-developed multi-axis motion control algorithm achieves high positioning accuracy and repeatability. 

The stacked dual-drive structure design has strong load-bearing capacity. 

High-resolution grating scale signal feedback enables a positioning accuracy of 50nm at the nanometer level. 

Multiple specifications and models are available, and customization is supported as per your requirements.