In the field of semiconductor manufacturing, the high-precision handling, calibration and loading of wafers are the core links to ensure the yield of chips. As an emerging force in the domestic semiconductor equipment field, Huzhou Pumu Semiconductor Co., Ltd. is providing efficient and precise automation solutions for the industry with its independently developed core products such as wafer transfer systems, wafer calibrators, wafer loading systems, and air flotation rotating shafts, helping domestic semiconductor equipment move towards high-end development.

I. Wafer Transfer System: The intelligent core of flexible handling

The wafer transfer system is a key link connecting various process modules in the semiconductor production line. The transfer system of Huzhou Pumu adopts high-precision servo drive and visual positioning technology, which can achieve seamless transfer of wafers between processes such as cleaning, photolithography and etching. Its modular design supports compatibility with multi-sized wafers (such as 8-inch and 12-inch), and is equipped with shock-absorbing and buffering structures as well as vacuum adsorption platforms to ensure zero contact damage during handling. In addition, the system integrates a real-time data feedback function, which can be linked with the MES system to optimize the production line rhythm.

Ii. Wafer Calibrator: Ensuring Nanometer-level alignment accuracy

In processes with strict alignment accuracy requirements such as photolithography and bonding, Huzhou Pumu's wafer calibrator controls the wafer position deviation within ±1μm through multi-axis collaborative control and optical alignment algorithms. Its innovation lies in:

Dynamic compensation technology: Real-time correction of displacement errors caused by temperature changes and vibrations;

Dual-camera cross-validation: Increase alignment success rate to 99.9%;

Quick mode switching: Supports one-click invocation of parameters between different processes.

This equipment has been applied in advanced packaging and third-generation semiconductor production lines, significantly reducing the scrap rate caused by poor alignment.

Iii. Wafer Loading System: The Efficiency Cornerstone of Automated Production

In response to the interaction requirements between the wafer box (FOUP/FOSB) and the process equipment, Prim has developed an automatic wafer loading system. Its core advantages include:

Robotic arm grasping mechanism: Adopting bionic design, the grasping force is adaptively adjusted;

Anti-static protective layer: prevents static discharge from damaging sensitive devices;

Intelligent scheduling algorithm: Dynamically allocate tasks based on production line load, increasing equipment utilization by more than 30%.

This system is compatible with the interfaces of mainstream semiconductor machines and has become the preferred solution for the upgrading and transformation of 8-inch / 12-inch Fab factories.

Iv. Air Flotation Rotating Shaft: An Engineering Breakthrough in Ultra-Precision Motion

As a core component for equipment motion control, the air-floating rotating shaft independently developed by Huzhou Pulim has broken through the friction limitations of traditional mechanical bearings:

Air static pressure bearing technology: Achieving nanoscale rotational accuracy (<0.001°);

Wear-free design: Lifespan exceeds 100,000 hours, maintenance costs are reduced by 70%.

High-speed response capability: Supports millisecond-level start and stop, meeting the rhythm requirements of advanced manufacturing processes.

This component has been successfully applied to high-end equipment such as photolithography machines and wafer bonding machines, breaking the foreign technological monopoly.

V. The Innovation Path of Huzhou Pumu Semiconductor

Huzhou Pumu Semiconductor, established in [year], specializes in the research and development as well as manufacturing of semiconductor-specific equipment. The company takes "Precision Manufacturing, Empowering the future of Chips" as its mission. It has gathered a team of senior engineers from international giants such as ASML and Applied Materials, and has established industry-university-research cooperation with Zhejiang University and the Institute of Microelectronics, Chinese Academy of Sciences. Its products have passed ISO9001 and SEMI standard certifications and have achieved mass shipments in leading domestic wafer fabrication plants.

Vi. Future Outlook: Domestic Substitution and Global Layout

With the global semiconductor industry chain shifting to China, Huzhou Pulim is accelerating the implementation of the following strategies:

Technology iteration: Develop an AI-based predictive maintenance system to further enhance equipment reliability;

Capacity expansion: Invest in building intelligent factories to meet the growing market demand;

International market: Passed CE and UL certifications, and entered the semiconductor markets of Southeast Asia, Europe and America.

Conclusion

Against the backdrop of breakthroughs in "bottleneck" technologies, Huzhou Pumu Semiconductor has taken its independently developed wafer processing equipment as a breakthrough point to contribute to the self-reliance and controllability of China's semiconductor industry. In the future, the company will continue to focus on the field of precision manufacturing, promote the transformation from "Made in China" to "Intelligently Made in China", and become an important part of the global semiconductor equipment supply chain.