A full-chain solution from ceramic chip forks to automated wafer handling

Amid the global semiconductor industry's trend towards high precision and intelligence, Huzhou Pumu Semiconductor Co., Ltd. has become a leading enterprise in the domestic semiconductor equipment niche market by leveraging its independently developed ceramic chip fork, wafer alignment table and precision motion table design technologies. The company focuses on key equipment in the wafer manufacturing and packaging and testing processes, breaks the foreign technological monopoly with innovative designs, and provides the industry with highly reliable and cost-effective solutions.

I. Analysis of Core Technology Products

Ceramic disc forks: A model of high-precision positioning and material innovation

Ceramic chip forks are one of Prim Semiconductor's signature products, specifically designed for wafer handling and positioning scenarios. Its core advantages include:

Material properties: High-performance ceramics such as aluminum nitride (AlN) or zirconia (ZrO₂) are adopted, featuring excellent high-temperature resistance, corrosion resistance and insulation performance, meeting the harsh environmental requirements of semiconductor processes.

Precision structure: The mechanical design is optimized through finite element analysis (FEA) to ensure sub-micron positioning accuracy during high-speed movement, making it suitable for critical processes such as photolithography and etching.

Modular design: Supports quick replacement and customized adaptation, compatible with mainstream wafer sizes (such as 8 inches, 12 inches).

2. Wafer alignment table: Precision guarantee for automated alignment

For processes such as photolithography alignment and chip bonding in wafer manufacturing, the wafer alignment table developed by Prim Semiconductor features the following technical highlights:

Multi-degree-of-freedom adjustment: Integrating the XYZ three-axis precision motion platform and combining with the vision system to achieve nanometer-level alignment accuracy, significantly improving the yield.

Intelligent control system: Equipped with self-developed algorithms, it supports real-time feedback and dynamic compensation, reducing human intervention.

Compatibility design: It can be adapted to different process equipment (such as photolithography machines, bonding machines, etc.), reducing the cost of production line transformation.

3. Precision motion table design: The core competitiveness of motion control

The precision motion tables of Prim Semiconductor adopt a modular architecture, covering multi-precision requirements from the nanometer level to the millimeter level:

Drive technology: Integrating piezoelectric ceramics, linear motors and magnetic levitation technology, it achieves a balance between high speed (>1m/s), high acceleration (>10g) and ultra-precise positioning.

Shock absorption and vibration isolation: The unique active shock absorption system effectively suppresses environmental vibration interference, ensuring the stability of long-term operation.

Customized services: Provide non-standard designs based on customer requirements, such as ultra-large stroke platforms or special load capacity configurations.

4. Wafer handling manipulator: A combination of intelligence and reliability

The wafer handling manipulator independently developed by the company is specially optimized for cleanroom environments:

Vacuum adsorption technology: Multi-zone independently controlled vacuum suction cups are adopted to prevent wafer deformation or damage.

Anti-vibration structure: Through the design of flexible joints and the application of damping materials, micro-vibrations during the handling process are reduced.

Visual guidance system: Integrating high-resolution cameras and deep learning algorithms to achieve wafer edge detection and precise grasping.

Ii. Technological Innovation and Industry Value

The technological breakthroughs of Prim Semiconductor are not only reflected in a single product, but also in the synergy effect of its full-chain solutions:

Acceleration of domestic substitution: Reducing equipment costs through independent research and development helps domestic wafer fabrication plants reduce their reliance on imported equipment.

Process upgrade support: High-precision equipment promotes the feasibility of mass production of advanced processes (such as below 7nm), enhancing the competitiveness of domestic semiconductors.

The concept of green manufacturing: The optimized design of equipment energy consumption complies with international environmental protection standards, contributing to sustainable development.

Iii. Future Outlook

Huzhou Prim Semiconductor is continuously increasing its investment in research and development, with a focus on the following directions:

1. Intelligent upgrade: Introduce AI and digital twin technology to achieve predictive maintenance of equipment and process optimization.

2. Expand application scenarios: Extend precision motion technology to broad semiconductor fields such as photovoltaics and panel displays.

3. Global layout: Strengthen international cooperation to promote "Made in China" to the international stage.

Conclusion

As a pioneer in the localization of semiconductor equipment, Huzhou Pumu Semiconductor has built a comprehensive technical ecosystem covering precision motion and automated handling, with innovative products such as ceramic chip forks and wafer alignment tables as its foundation. In the future, the company will continue to be driven by technological innovation and inject new impetus into the high-quality development of the global semiconductor industry.