Introduction

In the field of semiconductor manufacturing, the precision and efficiency of wafer processing directly determine the performance of chips. As process nodes move towards the nanoscale, the design of wafer calibration, loading and motion control systems has become a key challenge. Huzhou Pumu Semiconductor Co., Ltd. has provided high-precision and highly reliable solutions for the industry with its independently developed wafer calibrators, air flotation rotating shafts and precision motion tables, becoming an innovative model in the domestic semiconductor equipment field.

1. Wafer Calibrator: The core guarantee for nanoscale alignment

1. Technical background

Wafer calibration is a crucial step before processes such as photolithography and etching, which requires sub-micron-level position and Angle calibration. Traditional mechanical calibration is difficult to meet the demands of advanced manufacturing processes.

2. Prim's innovative solution

Optical + mechanical composite calibration: By integrating machine vision with high-precision displacement sensors, real-time alignment of wafer edges and marking points is achieved.

Adaptive algorithm: Automatically adjust calibration parameters for different materials (silicon/compound semiconductors) to reduce the risk of debris.

Application case: In a certain customer's production line, the calibration efficiency was increased by 40%, and the alignment accuracy reached ±0.5μm.

Ii. Wafer Loading System: Balancing Automation and Cleanliness

1. Industry pain points

Traditional loaders are prone to particulate contamination and have a slow disc changing speed, which affects the utilization rate of the production line.

2. Prim's breakthrough

Vacuum adsorption and shock absorption design: Low-friction materials and active shock absorption technology are adopted to prevent wafer damage.

Rapid exchange mechanism: The dual-station design supports continuous sheet changing without shutdown, increasing production capacity by 30%.

Cleanliness control: The internal air circulation system complies with the Class 100 standard and is suitable for advanced packaging production lines.

Iii. Air Flotation Rotating Shaft: The cornerstone of ultra-precise motion

1. Technical principle

Air flotation bearings form non-contact support through compressed air, eliminating mechanical friction and achieving nanometer-level rotational accuracy.

2. The technical advantages of Prim

Dynamic stability: The independently developed pneumatic control system can compensate for the gyroscopic effect during high-speed rotation.

Long-life design: The wear-free structure enables the bearing to last for over 100,000 hours, reducing maintenance costs.

Application scenario: It is used for high-precision rotating platforms in wafer inspection equipment, with an Angle repeat positioning accuracy of ±0.001°.

Iv. Precision Motion Table Design: Multi-degree-of-Freedom Cooperative Control

Design challenges

It is difficult for traditional servo systems to meet the requirements of high speed, high precision and multi-axis linkage simultaneously.

2. Prim's solution

Direct drive motor + crossed roller guide rail: Reduces transmission errors and achieves nanoscale linear motion.

Intelligent feedback system: Integrating laser interferometer and encoder to correct the motion trajectory in real time.

Modular architecture: Supports customized expansion (such as vacuum/anti-magnetic environment adaptation).

Conclusion

As the global semiconductor industry transitions towards intelligence and greenness, Huzhou Pulimu Semiconductor, with precision mechanical design and intelligent control technology as its core competitiveness, continuously breaks through the "bottleneck" links. Its innovative achievements such as wafer calibrators and air flotation rotating shafts not only help customers reduce costs and increase efficiency, but also provide solid support for the independent control of China's semiconductor equipment.