Huzhou Prim Semiconductor: Empowering wafer handling with precision technology, leading the new heights of semiconductor manufacturing.
In the cutting-edge field of semiconductor manufacturing, wafers, as the foundation of chips, play a decisive role in the yield and performance of the chips during their handling and processing. As the semiconductor industry demands increasingly higher precision and efficiency, technological innovations in key equipment such as wafer handling manipulators and wafer transfer systems have become the core driving force for industry progress. Huzhou Prim Semiconductor Co., Ltd. (hereinafter referred to as "Prim") is a pioneering innovator in the domestic semiconductor equipment sector. By relying on its independently developed precision air-floating motion platform, ceramic fork, wafer handling manipulator, and wafer calibrator, Prim is gradually becoming a technical benchmark in the industry, providing high-precision and high-efficiency solutions for the global semiconductor industry.
Wafer handling manipulator: The "precise hand" in semiconductor manufacturing
Wafer handling manipulators are crucial equipment in semiconductor production lines, responsible for transferring wafers between different devices. Their efficiency and accuracy directly determine the success or failure of chip production. With the rapid development of automation technology, the design and manufacturing of manipulators have become increasingly precise, leading to a revolution in wafer handling. Modern wafer handling manipulators typically adopt a six-axis robot structure, featuring flexible operation with multiple degrees of freedom, and integrating high-precision sensor-based feedback control functions. This design not only enhances the handling speed but also enables real-time monitoring and adjustment during the handling process, ensuring the safety and stability of the wafers throughout the entire handling process.
Prim Semiconductor has made significant breakthroughs in the field of wafer handling manipulators. The company's independently developed wafer handling manipulator integrates intelligent algorithms and data analysis technologies to optimize the handling path, reduce energy consumption, and enhance the operational efficiency of the equipment. Through this approach, the manipulator can achieve a working state in practical applications, significantly improving the automation level of the production line. Moreover, Prim's manipulator also has excellent vibration resistance capabilities, maintaining stability during high-speed movement and positioning, preventing wafer displacement, and thus ensuring the yield and performance of chip production.
Air-floatation rotating shaft: The key to achieving nanoscale precision
The air-floating rotating shaft is another core technology independently developed by Prim Semiconductor. This technology utilizes the principle of gas lubrication to ensure that the rotating shaft has almost no friction during operation, thereby achieving nanometer-level rotational accuracy. The application of the air-floating rotating shaft not only improves the operational efficiency of the equipment but also reduces energy consumption, providing a more environmentally friendly and efficient solution for semiconductor manufacturing.
During the semiconductor production process, the alignment and positioning of wafers require high precision. The air-floating rotating shaft ensures the precise alignment of wafers during transportation and processing through its nanoscale rotational accuracy. This technology is crucial for improving the yield and performance of chips, especially in key processes such as lithography and etching. Prim's air-floating rotating shaft technology fills the gap in domestic high-end semiconductor equipment, promoting the advancement of global semiconductor manufacturing towards higher precision and efficiency.
Ceramic spatula: The "reliable companion" for wafer handling
The wafer handling arm (ceramic fork) is the core component of the mechanical handling arm in semiconductor equipment. Since the wafer needs to be protected from contamination and damage during transportation, high requirements are imposed on the material and performance of the handling arm. Alumina ceramics and silicon carbide ceramics, due to their dense structure, high hardness, high wear resistance, good heat resistance, excellent mechanical strength, good insulation in high-temperature environments, and good corrosion resistance, among other physical properties, have become excellent materials for manufacturing the mechanical handling arm of semiconductor equipment.
Prim Semiconductor has significant advantages in the research and production of ceramic fork parts. The company uses alumina ceramic materials and through precise processing and optimized design, manufactures ceramic fork parts with high cost-effectiveness. These ceramic fork parts not only possess excellent physical properties but also demonstrate high stability and reliability in practical applications. By using ceramic fork parts, Prim's wafer handling manipulator can complete wafer transportation tasks more efficiently and safely, providing strong support for the semiconductor production line.
Wafer transfer system: Establishing a complete nanoscale technology matrix
The wafer transfer system is an essential component in the semiconductor production line, responsible for transporting wafers from one equipment to another to ensure the continuity and efficiency of the production process. Prim Semiconductor has built a complete nanoscale technology matrix through its own independently developed core equipment such as precise motion platforms, ceramic wafer forks, air-floating rotating shafts, and wafer calibrators. This technology matrix not only fills the gap in domestic high-end semiconductor equipment but also drives the global semiconductor manufacturing towards higher precision and efficiency.
Prim's wafer transfer system features a high level of automation and intelligence. By integrating advanced motion control technology and image processing technology, the system can achieve precise alignment and rapid transportation of wafers. Moreover, the system has excellent shock resistance and environmental adaptability, and can maintain stable operation under various complex working conditions. This comprehensive technical advantage makes Prim's wafer transfer system an ideal choice in semiconductor production lines.
Huzhou Prim Semiconductor: Innovation-driven, Leading the Future
Huzhou Prim Semiconductor Co., Ltd. was established in 2023. The team members are mainly composed of domestic doctoral and master's degree holders, senior grinding engineers, and senior experts in the fields of optical information science and technology and precision manufacturing. The company has been deeply engaged in the fields of complex robot system control, ultra-precision manufacturing processing, nanometer-level motion control, image vision, semiconductor, and optical products for many years, and possesses rich industry experience.
Prim Semiconductor is headquartered in Huzhou, Zhejiang Province. Its R&D production base is located in Huishan Economic Development Zone, Wuxi. It has nearly 100 employees and is divided into departments such as software algorithm research and development, mechanical design, electrical development, high-precision debugging control, and precise assembly processing. The company has an independent factory area of nearly 10,000 square meters, equipped with an advanced 2,000-square-meter clean laboratory and a 1,000-square-meter ultra-precision processing workshop. It is always committed to the design of ultra-high precision motion solutions, wafer transfer (EFEM), production of core precision components for equipment, integration of the entire machine's software and hardware systems, and the research and development customization of entire machine equipment.
Prim Semiconductor has established close R&D partnerships with numerous renowned research institutions both domestically and internationally, jointly promoting the research and commercial application of core technologies. The company's typical customers include leading manufacturers such as Huawei and SMIC. Its products are widely used in various fields such as semiconductors, precision optics, military, precision machine tools, and biomedicine. Through continuous technological innovation and market expansion, Prim Semiconductor is gradually becoming a leading enterprise in the global semiconductor equipment sector, contributing Chinese wisdom and solutions to the progress of the semiconductor industry.

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