Huzhou PrimTech Semiconductor Co., Ltd. (PrimTech), an innovation leader in the domestic semiconductor equipment sector, has been dedicated to nanometer-level ultra-precision motion control technology since its establishment in 2023. With a core team composed of PhDs, masters, and industry experts, the company has been deeply engaged in the control of complex robotic systems and ultra-precision manufacturing processes, establishing a comprehensive core equipment system covering the entire wafer processing flow. The company's headquarters is located in Huzhou, Zhejiang Province, and it has set up a nearly 10,000-square-meter R&D and production base in Wuxi, equipped with advanced clean laboratories and ultra-precision processing workshops. It provides high-precision and high-efficiency integrated solutions for the semiconductor, IC manufacturing, new energy, and other fields. PrimTech has received angel-round investment from well-known funds such as Zhejiang Business Venture Capital and Plum Angels, demonstrating the industry's high recognition of its technological strength. 

Core Product Matrix: The Key Support for Precision Manufacturing

1. Precision Motion Stage Design: The Cornerstone of Nanometer-level Positioning

The precision motion stage is a key equipment for achieving high-precision processing and inspection in semiconductor manufacturing. With its deep technical accumulation, Prim has developed a motion stage solution with positioning accuracy at the sub-hundred-nanometer level. Its design adopts a non-contact direct drive structure and anti-crawling crossed roller guides, combined with dual linear motor drive technology, which ensures high dynamic performance while achieving smooth low-speed operation and vibration-free high-speed performance. This motion stage has the ability to perform precise XYZ three-axis motion, with a post-compensation positioning accuracy of ±0.05μm and a unidirectional repeat positioning accuracy as low as ±7.5nm. The flatness and straightness are both controlled within the micrometer range, meeting the strict positioning accuracy requirements of advanced processes such as lithography and laser microprocessing. For different application scenarios, Prim also provides customized services, including vacuum environment adaptation and drift error control within 20nm after power failure, offering flexible precision motion control solutions to customers.

2. Wafer Alignment Stage: The Precise Guarantee of Process Accuracy

The wafer alignment stage, as the "positioning center" in semiconductor manufacturing, is responsible for achieving micron-level or even nanometer-level position adjustment of wafers during the process. Prim's wafer alignment stage features a high-rigidity structure design, effectively reducing the impact of vibration on alignment accuracy. It is equipped with precision guides and lead screw components, significantly reducing backlash and ensuring smooth movement. Its core functions include XYZ three-axis precise adjustment and θ-axis rotation compensation, capable of accurately correcting position shifts and rotational deviations of wafers during handling or processing. Additionally, it uses vacuum adsorption fixation technology to prevent wafer displacement during processing. The device integrates an advanced temperature compensation system to effectively counteract the interference of thermal expansion on alignment accuracy, performing outstandingly in lithography machines, coating machines, and advanced packaging processes. It provides reliable assurance for the perfect matching of chip patterns and mask plates, making it a key equipment for improving chip yield.

3. Ceramic Wafer Fork: The Reliable Guardian of Clean Handling

In the wafer handling process, the ceramic wafer fork, as a core component directly contacting the wafer, directly affects the wafer's cleanliness and integrity. Prim's ceramic wafer forks are made of high-purity alumina or silicon nitride materials, offering excellent wear resistance and chemical stability. They remain stable in complex process environments such as high temperatures, acids, and alkalis, effectively avoiding wafer surface scratches and contamination risks, ensuring wafer cleanliness meets standards. Through advanced material process optimization, the ceramic wafer fork achieves lightweight design, reducing the load on the mechanical arm while improving handling efficiency. Its excellent thermal stability ensures that wafers do not deform due to temperature differences during high-temperature processes, providing strong support for the safe and efficient transmission of wafers. With these core advantages, Prim's ceramic wafer forks have become the preferred products of semiconductor enterprises, especially demonstrating irreplaceable value in advanced manufacturing processes.

4. Wafer Calibrator: The Key Precondition for Precise Alignment

The wafer calibrator (also known as the wafer edge finder) is an important preprocessing equipment for wafers before entering core processes. Its core function is to achieve the center positioning and angle correction of wafers, with calibration accuracy up to ±0.1mm and angle accuracy ±0.1°, laying the foundation for the precise implementation of subsequent processes. Prim's wafer calibrator adopts a dual detection scheme of optical edge finding and mechanical edge finding. The optical system, through the collaborative work of light sources, optical lenses, and image sensors, scans edge signals during wafer rotation to precisely calculate the center offset. The mechanical edge finding method is used for wafers that are not suitable for vacuum adsorption, using symmetrically arranged sensors to detect the edge arc and achieve reliable positioning. This device can automatically identify the flat edge or notch reference point of the wafer to complete the direction calibration. For small-sized wafers, the flat edge alignment is adopted, while for 8-inch and larger wafers, the notch alignment method is used, meeting the processing requirements of wafers of different specifications. By eliminating the initial position deviation when the mechanical hand picks up the wafer, the wafer calibrator ensures the position consistency of the wafer at each process station, effectively avoiding the impact on processing results due to positioning deviations. It is a core component in the front-end equipment of the semiconductor industry. 

Technical Synergy: Empowering the High-Quality Development of the Semiconductor Industry

Huzhou Primex Semiconductor has built a complete nanometer-level technology matrix through its independently developed core equipment such as precision motion stages, wafer alignment stages, ceramic wafer forks, and wafer calibrators, achieving full-process technical coverage from wafer handling, calibration to precise positioning. These products work in synergy to form a closed-loop solution of "handling - calibration - alignment - processing", playing an irreplaceable role in key processes of semiconductor manufacturing such as lithography, etching, and packaging, providing high-precision and high-efficiency technical support for the global semiconductor industry.

As semiconductor technology advances towards smaller process nodes like 3nm and 2nm, the requirements for equipment precision and stability continue to rise. Huzhou Primex will continue to focus on ultra-precision motion control, concentrate on core technological innovation, optimize product performance, and expand application scenarios, providing more competitive precision equipment solutions for the semiconductor and IC manufacturing industries, and helping China's semiconductor industry break through technological bottlenecks and enter a new stage of high-quality development.