In the semiconductor manufacturing field, wafer processing technology is a crucial aspect that determines the performance and yield of chips. Huzhou PrimTech Semiconductor Co., Ltd., as an innovative pioneer in the domestic semiconductor equipment sector, has built a complete nanoscale technology matrix through its own R&D of core equipment such as wafer handling manipulators, ceramic sheet forks, wafer alignment tables, and precision motion tables, providing high-precision and high-efficiency solutions for the global semiconductor industry. 

Wafer handling robotic arm: The perfect integration of intelligence and precision 

The wafer handling manipulator is a core component in the semiconductor production line, and its design must meet the Class 1 clean environment requirements to ensure no particle contamination during the handling process. Prim's manipulator adopts an integrated mechanical and electrical design. Through high-precision sensors and an adaptive control system, it achieves a millimeter-level positioning accuracy for 12/18/24-inch diameter wafers (error ≤ ±0.1mm). Its innovative features include: 

Intelligent recognition technology: Combining image recognition with machine learning algorithms, it can monitor the status of wafers in real time and prevent damage during handling. 

Adaptive control: Automatically adjusts the operation mode according to environmental changes to ensure stability even under high temperatures or vibrations. 

Lightweight structure: By optimizing the design of the mechanical arm, the load is reduced, and the handling speed and flexibility are enhanced. 

These innovations have significantly enhanced the transmission efficiency of wafers from the manufacturing process to the processing stations, reduced the need for manual intervention, and laid a solid foundation for intelligent manufacturing. 

Ceramic plate fork: The guardian of high wear resistance and clean transportation 

In the process of wafer handling, the material in direct contact with the wafer is of vital importance. Prim's ceramic fork uses high-purity alumina or silicon nitride materials and has the following advantages: 

Excellent wear resistance: The ceramic material has high hardness, effectively preventing scratches on the wafer surface and prolonging the service life of the equipment. 

Chemical stability: Maintains performance even under high temperatures and acidic or alkaline conditions, reduces the risk of contamination, and ensures the cleanliness of the wafers. 

Lightweight design: Through advanced material processing techniques, the fork body is made lighter, reducing the burden on the mechanical arm and enhancing the handling efficiency. 

Thermal stability: Maintaining mechanical properties during high-temperature processes and preventing wafer deformation due to temperature differences. 

The wide application of ceramic blade cutters has made Prim equipment the preferred choice for semiconductor companies, especially in advanced manufacturing processes. 

Wafer alignment station: The expert for achieving nanometer-level precision positioning 

The wafer alignment station is the core equipment for ensuring the precision of chip manufacturing. Prim's solution achieves the following functions through high-precision optical sensors and a closed-loop control system: 

Real-time calibration: In key processes such as lithography and etching, the wafer position is automatically adjusted to compensate for mechanical errors and ensure the accuracy of the patterns. 

High-speed response: Utilizing a precise motion mechanism, it can complete positioning within milliseconds, thereby enhancing production efficiency. 

Environmental adaptability: Through the temperature compensation algorithm, the influence of thermal deformation is eliminated, ensuring long-term stability. 

This technology significantly reduces the wafer alignment error and improves the chip yield, providing a reliable guarantee for the manufacturing of high-integration chips. 

Precision Motion Platform: The Innovative Engine for Nanometer-Level Movement 

The precision motion platform is the "heart" of the wafer processing equipment. Prim achieved a breakthrough through air-floating technology and intelligent control: 

Air-floatation drive: Utilizing air bearings to eliminate mechanical friction and achieving nanometer-level positioning accuracy, it is suitable for ultra-precision processing. 

Intelligent Control: Integrating sensor networks and adaptive algorithms, it optimizes the motion trajectory in real time, enhancing response speed and stability. 

Multi-axis collaboration: Supports X-Y-Z multi-degree-of-freedom movement, meeting complex process requirements such as wafer inspection and packaging. 

These innovations have pushed semiconductor manufacturing to achieve higher precision, providing crucial technical support for cutting-edge fields such as 5G and AI. 

Conclusion: Technology leads the future 

Huzhou Prim Semiconductor has achieved a breakthrough through the collaborative innovation of wafer handling manipulators, ceramic chip forks, wafer alignment tables and precision motion tables. This not only fills the gap in domestic high-end semiconductor equipment, but also promotes the global industry towards intelligent and efficient development. In the future, with continuous technological iteration, Prim Semiconductor will continue to lead the new era of semiconductor manufacturing.