A pioneer in nanoscale semiconductor manufacturing: The innovative practices of Huzhou Prim Semiconductor Co., Ltd.
As semiconductor manufacturing progresses towards 3nm and lower process technologies, the processing accuracy of wafers has been enhanced to the nanometer level, presenting unprecedented challenges to equipment performance. Huzhou PrimTech Semiconductor Co., Ltd., as a leading enterprise in the domestic semiconductor equipment sector, has built a complete nanometer-level technology matrix through its independently developed core equipment such as ceramic wafer forks, wafer alignment tables, precise motion tables, and wafer handling manipulators. This not only fills the gap in domestic high-end semiconductor equipment but also drives global semiconductor manufacturing towards higher precision and efficiency.
I. Ceramic Blade Fork: The "Traceless Hand" for Wafer Handling
During the wafer handling process, the direct contact material of the wafer is crucial for its quality and performance. Ceramic fork clips, due to their outstanding wear resistance, anti-contamination properties and chemical stability, have become indispensable accessories in semiconductor production. Prim's ceramic fork clips are made of high-purity alumina ceramic material. Through cold isostatic pressing molding and high-temperature sintering processes, they ensure a dimensional accuracy of ±0.001mm and a surface finish of Ra0.1. They can operate stably at a temperature of 1600℃. Their unique ceramic bonding technology enables the hollow structure arms to maintain high mechanical strength even in an environment of 800℃, effectively avoiding scratches or contamination of the wafer during the handling process.
II. Wafer Alignment Station: Nanoscale Positioning
The wafer alignment station is the core equipment that ensures the precise position and angle of the wafer during critical processes such as lithography and etching. Prim's wafer alignment station achieves sub-micron positioning accuracy through laser interferometry and optical encoder technology, and can correct deviations in the equipment or errors caused by improper operation. Its intelligent control system can monitor the wafer's posture in real time, ensuring stability during high-speed movement and providing the best production results for subsequent processes.
III. Design of Precision Motion Platform: The Art of Balancing High Speed and Stability
The precision motion platform is the core equipment for wafer processing, and its performance directly affects the chip yield and production efficiency. Prim's motion platform uses aerospace aluminum alloy and special steel, combined with high-precision positioning technology (such as air-floating rotating shafts), and maintains rigidity even during high-speed operation. In terms of dynamic performance optimization, by reasonably arranging the motion components and optimizing the platform weight, the response speed during acceleration and deceleration has been improved. Moreover, the modular design enables the equipment to be flexibly combined to meet different customer needs, while reducing maintenance costs.
IV. Wafer Handling Manipulator: The Future of Intelligence and Autonomy
The wafer handling manipulator is the "flexible arm" in the semiconductor production line. Its structure consists of a drive system, sensors, a control system and a mechanical arm. Prim's manipulator is equipped with highly sensitive sensors and an intelligent vision system, which can monitor various indicators during the handling process in real time to ensure safe and stable operation. Its precise dynamic response capability enables it to quickly adapt to changes in the production environment under different speeds and loads. In the future, through machine learning and artificial intelligence algorithms, the manipulator will achieve self-optimization of handling strategies, further improving production efficiency and reducing losses.
V. Huzhou Prim Semiconductor: The Pioneering Leader in Technological Innovation
Since its establishment, Huzhou Prim Semiconductor Co., Ltd. has been dedicated to the research and production of core components of semiconductor equipment. Through its own R&D of equipment such as air-floating rotating shafts, ceramic fork plates, wafer handling manipulators and precision motion tables, the company has broken the foreign technological monopoly and provided important support for the domestic production of high-end semiconductor equipment. Prim's products are widely used in key links such as chip manufacturing and packaging testing. Its nanometer-level technology matrix not only improves production efficiency but also reduces production costs.
VI. Industry Impact and Future Prospects
Prim's innovative practices have driven the global semiconductor manufacturing towards higher precision and efficiency. As market demands change, the company will continue to be customer-centric and focus on developing more innovative and professional semiconductor solutions. In the future, in the fierce competition within the semiconductor industry, Prim, with its efficient, flexible and intelligent production equipment, is expected to gain a larger market share and continue to lead the new future of the semiconductor industry.
Through continuous technological innovation, Huzhou Prim Semiconductor Co., Ltd. is becoming an important player in the global semiconductor industry. Its products and services not only meet the current market demands, but also lay a solid foundation for the long-term development of the semiconductor industry.

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