In the semiconductor manufacturing field, the wafer serves as the core carrier, and its processing accuracy directly determines the performance of the chips. Huzhou Prim Semiconductor Co., Ltd. (hereinafter referred to as "Prim") is leveraging its independently developed core technologies such as wafer calibrators, ceramic fork, precision motion platform, and air-floating rotating shaft to drive the advancement of Chinese semiconductor equipment towards higher precision and intelligence. 

Wafer calibrator: The "positioning expert" with micrometer-level accuracy 

Wafer calibration is a crucial step in semiconductor manufacturing, directly influencing the accuracy of subsequent processes such as lithography and etching. Prim's wafer calibrator uses sensors to monitor the position of the wafer in real time, combined with a precise adjustment mechanism to achieve micrometer-level positioning, ensuring that the wafer maintains its posture throughout the transfer and processing. Its innovative design includes: 

Adaptive edge detection: Utilizing optical or mechanical sensors to identify the edge of the wafer, it automatically adjusts the clamping force to avoid positioning deviations caused by differences in wafer thickness. 

Dynamic compensation algorithm: Through a closed-loop control system, it real-time corrects motion errors to cope with temperature fluctuations or vibration disturbances in the production environment. 

Multi-angle calibration capability: Supports precise positioning of wafers in complex postures such as rotation and inclination, meeting the requirements of advanced packaging processes. 

This technology has been applied in scenarios such as wafer inspection and lithography alignment, significantly improving the yield rate and reducing the risk of wafer scrapping due to positioning errors. 

Ceramic disc fork: The "dust-free guardian" for wafer handling 

During the wafer handling process, the selection of materials for direct contact is of utmost importance. The ceramic wafer forks of Prim have been made using high-purity alumina or silicon nitride materials, which offer the following advantages: 

High wear resistance: The hardness is close to that of diamond, preventing the wafer surface from being scratched and extending the service life of the equipment. 

Chemical stability: It does not cause pollution in high-temperature or acidic/alkaline environments, ensuring the purity of wafers during processes such as etching and cleaning. 

Structural optimization design: By achieving a balance between weight reduction and strength, it reduces the motion inertia and enhances the handling efficiency. 

The wide application of ceramic sheet forks has enabled Prim equipment to perform exceptionally well in high-end manufacturing processes such as 3D NAND and advanced logic chips, making it a trusted "dust-free handling solution" for customers. 

Precision motion platform: The "motion center" with multi-degree-of-freedom control 

The precision motion platform is the core actuator of semiconductor equipment. Prim achieves nanometer-level precision through air-floating technology. 

Air-floating bearing technology: By using compressed air to create a uniform air film, mechanical friction is eliminated, allowing the moving platform to maintain zero contact wear during high-speed operation, with a precision reaching the nanometer level. 

Six-axis联动 control: Integrates X/Y/Z translation and pitch/yaw/roll rotation axes. Through multi-axis linkage algorithms, it enables complex trajectory movements， meeting the requirements of scenarios such as wafer inspection and lithography. 

Intelligent control system: By integrating real-time feedback from sensors with AI algorithms, it dynamically adjusts motion parameters to cope with changes in the production environment. 

This technology has been applied to wafer inspection equipment, enabling precise positioning of the wafer in three-dimensional space and providing a stable foundation for defect detection. 

Air flotation rotating shaft: The "core engine" for high-precision rotation 

The air-float rotating shaft is a key component of the precision motion platform. Prim broke through the technical barriers through innovative design: 

Air-floating bearing structure: Utilizes a porous air supply design to ensure uniformity of the air film, avoiding the friction and vibration problems of traditional mechanical bearings. 

Dynamic balance optimization: Through finite element analysis to simulate the distribution of the gas film, combined with experimental data to adjust the supply gas parameters, to achieve the stability of the rotating shaft during high-speed operation. 

Material and Process Innovation: Select materials with low thermal expansion coefficient to reduce the impact of temperature changes on accuracy; adopt ultra-precision grinding technology to ensure that the surface roughness of the bearing reaches the nanometer level. 

This technology enables the rotation axis to achieve nanometer-level accuracy in wafer inspection, providing reliable and high-precision rotational support for semiconductor equipment. 

Technical collaboration: Building an innovative ecosystem for semiconductor equipment 

The core technology of Prim is not isolated; instead, it is integrated through collaborative design to form a complete solution: 

Wafer calibrator is linked with the motion stage: The calibrator provides initial positioning data, and the motion stage performs precise handling. The combination of the two realizes the full-process automation of wafer from storage to processing. 

The ceramic disc fork and the air-floating rotating shaft complement each other: The ceramic disc fork ensures pollution-free handling, while the air-floating rotating shaft provides high-precision rotation, jointly enhancing the efficiency of wafer processing. 

Modular design concept: Through standardized interfaces and scalable architecture, it enables customers to customize as needed, reducing equipment complexity and maintenance costs. 

Conclusion: Promoting the domestic production of semiconductor equipment through innovation-driven approaches 

Prim has independently developed the wafer calibrator, ceramic fork, precision motion platform and air-floating rotating shaft. This has broken the foreign technological monopoly and provided domestic equipment with high precision and high reliability for semiconductor manufacturing. In the future, the company will continue to focus on the field of ultra-precision motion control, promote the advancement of Chinese semiconductor equipment towards intelligence and modularization, and contribute to the upgrading of global semiconductor industries.