In the highly precise world of semiconductor manufacturing, even a single micrometer-level error can affect the performance and yield of the chips. Huzhou Prim Semiconductor Co., Ltd. (hereinafter referred to as "Prim") is a pioneering innovator in the domestic semiconductor equipment field. By relying on its own-developed core technologies such as wafer transfer system, wafer loading system, air-floating rotating shaft, and wafer alignment platform, Prim is driving China's semiconductor industry to make breakthroughs towards higher precision and intelligence. 

I.  Wafer Transfer System: The "Precise Artery" for Efficient Transmission 

The wafer transfer system is the "blood vessel" of the semiconductor production line, responsible for efficiently and safely transferring wafers between different processes. Prim's wafer transfer system ensures that wafers are protected from damage during movement through a highly automated process design that combines pneumatic transmission, electric drive transmission, and vacuum suction, among other methods. Its core advantage lies in: 

High-precision positioning: Utilizing precise servo control, it achieves sub-micron-level motion accuracy, ensuring the stability of the wafer's position during transportation. 

Dynamic stability: By optimizing the structural design, the vibration interference of the equipment itself is reduced, providing a reliable foundation for subsequent processing. 

Scene adaptability: It can automatically adjust the transmission strategy according to different wafer sizes and materials, thereby enhancing production flexibility. 

II. Wafer Loading System: The "Dust-Free Guardian" of Automation and Safety 

The wafer loading system is the "first checkpoint" for wafer entry into the processing stage. Its core lies in achieving rapid and damage-free wafer grasping and placement. Prim's loading system integrates intelligent recognition technology, using cameras and sensors to monitor the wafer status in real time, ensuring that each wafer is in the precise position. Its innovative design includes: 

Adaptive clamping: Utilizing a three-point edge clamping mechanism, the structure is simple and highly compatible, capable of accommodating wafers of different thicknesses and reducing human errors. 

Intelligent error correction: Through a closed-loop control system, real-time corrections are made for position deviations during the loading process, ensuring that the wafers maintain perfect alignment in subsequent processing. 

Efficient collaboration: Seamlessly integrated with the robotic arm, it enables rapid loading and unloading of wafers, significantly enhancing the production speed. 

III. Air-float rotating shaft: The "core engine" for high-precision rotation 

The air-floating rotating shaft is a key component of the precision motion platform, and its performance directly affects the accuracy of wafer processing. Prim's air-floating rotating shaft has overcome the friction and vibration limitations of traditional mechanical bearings through innovative design. Its key technical features include: 

Air-floating bearing technology: Utilizing compressed air to create a uniform air film, eliminating mechanical friction and achieving zero contact wear, with precision reaching the nanometer level. 

Multi-axis coordinated control: Integrates X/Y/Z translation and rotation axes, using precise algorithms to achieve complex trajectory movements, meeting the high-precision requirements of processes such as lithography and etching. 

Dynamic compensation capability: By integrating real-time feedback from sensors with AI algorithms, it dynamically adjusts rotation parameters to cope with temperature fluctuations or vibration disturbances in the production environment. 

IV. Wafer Alignment Station: The "Optical Expert" for Micron-Level Positioning 

The wafer alignment station is the "alignment expert" in semiconductor manufacturing, and its accuracy directly determines the yield of the chips. Prim's wafer alignment station uses sensors to monitor the position of the wafer in real time, combined with a precise adjustment mechanism, to achieve alignment accuracy of micrometers. Its core functions include: 

Adaptive edge detection: Utilizing optical or mechanical sensors to identify the edge of the wafer, it automatically adjusts the clamping force to avoid positioning deviations caused by differences in wafer thickness. 

Multi-angle calibration capability: Supports precise positioning of wafers under complex postures such as rotation and inclination, meeting the requirements of advanced packaging processes. 

Real-time error correction: Through the closed-loop control system, dynamic compensation is carried out for motion errors to ensure that the wafers maintain perfect alignment during key processes such as lithography and etching. 

V. Huzhou Prim Semiconductor: An "Innovation Benchmark" in Technology 

Prim was founded in 2023, with its headquarters located in Huzhou, Zhejiang Province, and its R&D and production base set up in Huishan Economic Development Zone, Wuxi. The company focuses on "ultra-high precision motion scheme design, wafer transfer, and production of core precision components of equipment", and is committed to providing integrated solutions for the global semiconductor industry. Its core advantages include: 

Technical barriers: We have cumulatively applied for dozens of invention patents, utility model patents and software copyrights, thereby establishing a complete technical matrix ranging from core components to complete machinery equipment. 

Research and development capabilities: The team is composed of personnel from the Institute of Automation of the Chinese Academy of Sciences, returning overseas PhDs, and former employees from top semiconductor international companies. They possess profound industry experience and innovative capabilities. 

Market recognition: The customers include leading enterprises such as SMIC and Shanghai Silicon Industry. The products are widely used in semiconductor, precision optics, and biomedicine fields. 

VI. Future Outlook: Leading "Chinese Precision" in Semiconductor Manufacturing 

As the global semiconductor industry moves towards higher precision and efficiency, Prim will continue to focus on customers and deepen its expertise in key areas such as ultra-precision motion platforms and EFEM wafer handling. The company has initiated the Yancheng high-end equipment manufacturing project to further expand production capacity and technology iterations. In the future, Prim will leverage its technological advantages and innovation capabilities to provide higher-quality products and services for the global semiconductor industry, and promote Chinese semiconductor equipment to take center stage on the global stage. 

On the highly precise track of semiconductor manufacturing, Huzhou Prim Semiconductor is writing a new chapter for the global semiconductor industry with "Chinese precision".