In the microscopic world of semiconductor manufacturing, precision is an art measured in nanometers. As the global semiconductor industry moves towards smaller processes and higher integration, what supports this progress is not only the breakthrough of photolithography machines, but also the coordinated evolution of a series of precision subsystems. Huzhou Pumu Semiconductor Co., Ltd. has emerged as a technological innovator against this backdrop. Its independently developed precision motion tables, wafer handling robots, wafer alignment tables, and ceramic chip forks, among other products, form the key "sibling" system of semiconductor manufacturing equipment, quietly driving the precision revolution in chip manufacturing.

Precision sports table: Nanoscale precise dance

In semiconductor manufacturing, the precision motion table is like an invisible ballet dancer, performing displacements accurate to the nanometer level at the microscopic scale. The precision motion table developed by Prim Company adopts an innovative combination design of crossed roller bearings and linear motors, achieving sub-micron positioning accuracy and nano-level repeat positioning accuracy. Its unique air bearing technology eliminates mechanical contact friction, bringing the smoothness of movement to an unprecedented level. Even more remarkable is that this motion stage integrates a high-resolution grating feedback system and advanced control algorithms, which can maintain extremely high stability during high-speed movement and meet the strict requirements for positioning accuracy in processes such as photolithography and etching. This kind of sports table has become an indispensable core component in the manufacturing of advanced process chips.

Wafer handling robot: Precise transfer in a sterile environment

In a Class 100 cleanroom environment, the wafer handling robot is responsible for safely transferring the invaluable wafers from one process module to the next. Prim's mechanical hand adopts a six-axis linkage design and combines a lightweight arm structure made of carbon fiber reinforced composite materials, which significantly reduces the inertial effect while ensuring rigidity. Its end effector is equipped with dual modes of vacuum adsorption and edge clamping, which can meet the handling requirements of wafers of different sizes. It is particularly worth mentioning that this mechanical hand integrates an advanced force feedback system, which can sense even the slightest change in contact force and prevent any damage to the wafers during the handling process. In three-dimensional packaging processes such as 3D NAND flash memory, the role of this high-precision manipulator is particularly crucial.

Wafer alignment Station: The Master of Spatial Calibration in the microscopic world

When chip manufacturing enters the nano era, the accuracy of wafer alignment directly affects the electrical performance of devices. Prim's wafer alignment table adopts a technical solution that integrates optical interferometry and machine vision, achieving alignment accuracy at the 0.1 micron level. Its innovative dual-table design enables the pre-positioning of the next wafer while measuring and aligning, significantly enhancing the equipment throughput. The active shock absorption system equipped on the alignment table can effectively isolate the ground vibration interference, while the temperature compensation algorithm ensures the stability of alignment accuracy under different environmental conditions. For key processes such as photolithography registration and bonding alignment in advanced manufacturing processes, this high-precision alignment table has become a key factor in improving yield.

Ceramic disc forks: The precise crystallization of materials science

In semiconductor equipment, ceramic chip forks, as precision components for carrying and transmitting wafers, need to possess extremely high mechanical strength, excellent chemical stability, and an extremely low particle generation rate. The aluminum nitride-based ceramic disc forks developed by Prim have achieved a breakthrough in material density through a special sintering process, with their surface roughness controlled below Ra0.05μm, significantly reducing the risk of particle contamination. The clamping surface of the chip fork is treated with micron-level texture, which ensures sufficient friction while avoiding mechanical damage to the wafer surface. This type of ceramic chip fork has been successfully applied in equipment with extremely high cleanliness requirements such as EUV lithography machines, becoming an "invisible guardian" that ensures the cleanliness of the chip manufacturing environment.

The technological philosophy and industrial responsibility of Pulim, Huzhou

The technological development path of Huzhou Pumu Semiconductor Co., Ltd. reflects the unique innovation logic of Chinese semiconductor equipment enterprises - not simply imitating the products of international giants, but conducting in-depth technological research throughout the entire industrial chain, from basic materials, core components to system integration. The company has established a complete R&D system ranging from CAD design to CAE simulation, and then to precision processing and assembly testing. With the support of universities such as Zhejiang University, it has formed an innovative ecosystem of deep integration of industry, academia and research. Its products have entered the supply chains of leading domestic enterprises such as SMIC and Hua Hong Group, and are gradually entering the international market.

Against the backdrop of the current global semiconductor industry landscape reconstruction, the development of Prim Company holds special significance. Through continuous technological iteration, the company is rewriting the history of relying on imports for core components of high-end semiconductor equipment. The technical indicators of its precision motion table and other product lines have reached the international advanced level, and some innovative designs have even surpassed foreign competitors. This technological breakthrough not only reduces the equipment procurement costs of domestic semiconductor manufacturing enterprises, but also enhances the security and controllability of the industrial chain.

Looking ahead, with the rise of emerging technologies such as Chiplet and quantum chips, semiconductor manufacturing will face technical challenges in more dimensions. Huzhou Pumu Semiconductor Co., Ltd. is actively laying out cutting-edge fields such as next-generation intelligent motion control technology and materials adapted to extreme environments. The adaptive precision motion platform under its research and development has entered the prototype testing stage. In the never-ending precision race of semiconductors, Prim is writing its own technological chapter with Chinese wisdom and contributing an indispensable force to the progress of the global semiconductor industry.