In the microscopic world of semiconductor manufacturing, the birth of each chip is a dance precise to the nanometer level. In this dance, Huzhou Pumu Semiconductor Co., Ltd. is like a highly skilled choreographer, providing a stable and efficient "stage" for semiconductor manufacturing through its independently developed core equipment such as precision motion tables, wafer alignment tables, ceramic chip forks, and wafer handling manipulators. This technology enterprise located in the Yangtze River Delta region of China is writing a new chapter of "Made in China" in the global semiconductor equipment field with its unique technology matrix.

Precision motion table: Motion art with nanometer-level precision

The precision motion table can be regarded as the "heart" of semiconductor manufacturing equipment, and its performance directly determines the precision limit of chip manufacturing. The precision motion table developed by Prim Company adopts innovative magnetic levitation drive technology, combined with a high-resolution grating feedback system, achieving sub-nanometer positioning accuracy and a repeat positioning error of less than 0.1%. What is even more remarkable is that this moving table not only maintains extremely high precision but also has a millisecond-level rapid response capability, which can meet the dual strict requirements of advanced manufacturing processes for speed and precision. This kind of motion stage is widely used in key process links such as photolithography, etching and coating, providing a stable and reliable "motion platform" for chip manufacturing.

Wafer alignment Station: The master of precise positioning in the microscopic world

In the process of wafer processing, alignment accuracy is often more crucial than the processing accuracy itself. Prim's wafer alignment station adopts multi-sensor fusion technology and combines advanced image processing algorithms to achieve alignment accuracy within 0.5 microns between the wafer and the mask. The device's unique active shock absorption system can effectively isolate environmental vibration interference, while the intelligent temperature control module ensures that the alignment error caused by temperature drift is less than 0.01%. It is particularly worth mentioning that the Prim alignment station also features an automatic learning function, which can optimize alignment parameters based on the characteristics of different wafers. This "adaptive" capability significantly enhances production efficiency and yield.

Ceramic disc forks: The perfect blend of materials science and precision engineering

Ceramic chip forks, as key actuating components in the wafer handling process, their performance directly affects the safety of the wafers and the stability of the process. The aluminum nitride ceramic plate forks developed by Prim have achieved a balance between extremely high mechanical strength and excellent insulation performance through a special material ratio and precise sintering process. The surface roughness of this product is controlled within 0.1 microns, and the edge chamfer accuracy reaches ±5 microns. It can safely and reliably handle wafers of various sizes ranging from 6 inches to 12 inches. Even more commendable is that Prim has significantly reduced the risk of particle contamination through surface coating technology, increasing the cleanliness of wafers by two orders of magnitude.

Wafer handling manipulator: A harmonious unity of high speed and precision

In highly automated semiconductor factories, wafer handling robots play an important role as "air Bridges". The mechanical hand of Prim adopts a modular design and can be flexibly configured according to different process requirements. Its unique parallel mechanism design makes the motion trajectory more stable, and the repeat positioning accuracy of the end actuator reaches ±2 microns. This mechanical hand also integrates an advanced visual guidance system, which can achieve rapid identification and precise grasping of wafers in complex environments. The specially designed vacuum adsorption system ensures that the wafers will not develop microcracks or particle contamination during handling, providing a reliable "handling solution" for chip manufacturing.

Huzhou Pumu: Chinese Strength in the Field of Semiconductor Equipment

Huzhou Pumu Semiconductor Co., Ltd. has grown into an important force in the domestic semiconductor equipment field. The success of Prim lies not only in its outstanding product performance, but also in its commitment to the R&D concept of "customer process demand-oriented". The company has established a complete system from design verification to mass production and delivery, and is capable of providing customers with all-round services ranging from single machine equipment to complete line solutions.

Today, as the semiconductor industry moves towards higher precision and efficiency, Huzhou Pumu Semiconductor Co., LTD., with its profound technological accumulation and continuous innovation capabilities, is gradually breaking the foreign technological monopoly and contributing to the self-reliance and controllability of China's semiconductor industry. From precision motion tables to wafer handling robots, every product is a vivid demonstration of China's manufacturing strength, and every technological breakthrough is the best interpretation of the "craftsman spirit". With the reshaping of the global semiconductor industry landscape, Chinese technology enterprises like Prim are bound to embrace broader development space and write more brilliant chapters on the world's semiconductor equipment map.