In the field of semiconductor manufacturing, the performance of precision motion control and wafer processing systems directly affects the accuracy, efficiency and yield of chip manufacturing. As an innovative enterprise in the domestic semiconductor equipment field, Huzhou Prum Semiconductor Co., Ltd. is gradually breaking the international technological monopoly by making breakthroughs in key technologies such as precision motion table design, wafer loading systems, air float rotation shafts and wafer alignment tables, providing strong support for the localization of China's semiconductor equipment.

1. Precision motion table design: The core of high precision and high stability

Precision motion tables are core actuating components of semiconductor manufacturing equipment and are widely used in key process links such as photolithography, etching, and coating. Its performance directly affects the precision and efficiency of chip manufacturing.

The precision motion stage of Huzhou Prim adopts magnetic levitation drive + high-precision grating feedback technology, achieving sub-nanometer positioning accuracy and millisecond-level response speed. Its innovative designs include:

High-rigidity structure: Utilizing high-strength aluminum alloy and carbon fiber composite materials, it reduces motion vibration and enhances stability.

Active shock absorption system: Effectively suppresses environmental vibration interference and ensures nanometer-level motion accuracy.

Intelligent temperature control compensation: By adjusting motion parameters in real time through temperature sensors, thermal drift errors are reduced.

This motion stage has been successfully applied to advanced process equipment, meeting the high-precision requirements of 7nm and below processes.

2. Wafer loading system: An efficient and stable wafer transfer solution

The wafer loading system is a key interface between semiconductor manufacturing equipment and the external environment, directly affecting the automation level and yield of the production line. Prim's wafer loading system adopts a modular design and has the following advantages:

Vacuum adsorption + mechanical clamping dual mode: Adapted to wafers of different sizes (6 inches to 12 inches), ensuring no particle contamination or wafer damage during handling.

High-speed and high-precision transmission: By integrating visual guidance and servo control, it achieves a positioning accuracy of ±1μm, enhancing the efficiency of the production line.

Compatible with multiple wafer boxes (FOUP/SMIF) : Supports SEMI standard interfaces, facilitating integration into devices from different manufacturers.

This system has been verified in many domestic Fab factories, significantly enhancing the stability and efficiency of wafer transmission.

3. Air flotation rotating shaft: A key component with low friction and high dynamic performance

Air float rotating shafts are widely used in scenarios that require high-precision rotational motion, such as wafer alignment and photolithography alignment. The air flotation rotating shaft of Prim adopts air bearing technology and has the following features:

Zero-contact friction: By using high-pressure air to form an air film, mechanical friction is eliminated to achieve sub-micron rotational accuracy.

Ultra-high rotational speed stability: It can operate stably above 1000rpm and is suitable for high-speed alignment processes.

Low maintenance requirements: No wearing parts, with a lifespan of tens of thousands of hours, reducing equipment maintenance costs.

This technology has been applied to wafer alignment tables and lithography machine workpieces, significantly enhancing the motion performance of the equipment.

4. Wafer alignment table: A key device for nanometer-level alignment accuracy

The wafer alignment table is a core device in processes such as photolithography and etching, and its alignment accuracy directly affects the quality of chip pattern transfer. Prim's wafer alignment table adopts multi-sensor fusion and intelligent algorithms to achieve alignment accuracy below 0.5μm. The main technical highlights include:

High-resolution optical alignment system: Combining CCD vision and laser interferometry to achieve sub-micron-level alignment detection.

Active compensation system: Through real-time feedback adjustment, it reduces alignment errors caused by factors such as temperature and vibration.

Adaptive alignment algorithm: Optimize alignment parameters for different wafer thicknesses and warpage conditions to improve yield.

This alignment table has been applied in batches in advanced domestic packaging and photolithography equipment, significantly enhancing production efficiency and yield.

5. Huzhou Prim Semiconductor Co., LTD. : An innovative force in domestic semiconductor equipment

Huzhou Prim Semiconductor Co., Ltd. was established in 2023, specializing in the research and development and manufacturing of precision motion control, wafer processing systems, and semiconductor testing equipment. The core advantages of the company include:

Independent research and development capabilities: Possessing over 30 core patents, covering key technologies such as precision mechanical design, motion control algorithms, and optical detection.

Full-chain verification system: From design, simulation to process verification, ensuring product reliability and stability.

Customer customized services: We can provide customized solutions based on different process requirements, and are compatible with mainstream semiconductor equipment manufacturers at home and abroad.

At present, Prim's products have entered the supply chains of many domestic Fab factories and equipment manufacturers, and are gradually expanding into the international market, contributing to the domestic substitution of semiconductor equipment in China.

Conclusion: Promote the localization of semiconductor equipment and contribute to the rise of "Chinese chips"

As semiconductor manufacturing moves towards higher precision and efficiency, technological breakthroughs in core components such as precision motion tables and wafer alignment tables have become particularly important. Huzhou Prim Semiconductor Co., Ltd. is gradually breaking the technological monopoly of international giants with its innovations in precision motion control, air-float rotating shafts, wafer loading and alignment systems, etc., providing solid support for the independent control of China's semiconductor industry. In the future, as the company continues to increase its investment in research and development, its products are expected to occupy a more important position in the global semiconductor equipment market, contributing to the rise of "Chinese chips".