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From core components to the entire system, Huzhou Prim has unlocked a new solution for wafer alignment and transfer

n the entire process of advanced process chip manufacturing, precision motion control capability is the underlying core that determines equipment yield and operational stability.

从核心部件到整台系统,湖州普利姆解锁晶圆对准与移载新方案

在先进制程芯片制造的全流程中,精密运动控制能力是决定设备良率、运行稳定性的底层核心。从晶圆在不同工位间的移载传输,到光刻环节的纳米级对准定位,再到检测工序的高精度姿态调整,每一个环节的运动误差都可能直接传导至芯片制造结果,最终影响产品的性能与良率。

Deeply cultivating precision motion control: Innovative practice of core components in wafer manufacturing process of Huzhou Prime Semiconductor

On the precision track of semiconductor manufacturing, the efficient circulation of every wafer and the precise alignment at the micron level are inseparable from the technical support of core moving components.

Huzhou Pulim Semiconductor: Lays a Solid Foundation for Wafer Manufacturing Precision with Precision Motion Technology

As semiconductor manufacturing continues to advance towards advanced processes, the precision and alignment accuracy of wafers as they flow through hundreds of devices directly determine the final yield and performance of chips.

Deeply cultivating the precision semiconductor track: A comprehensive view of wafer core component technology at Huzhou Prim

Based on the core technology accumulation of ceramic wafer forks, the wafer handling robot developed by our company adopts a multi-degree-of-freedom collaborative control algorithm, paired with a lightweight carbon fiber structural arm.

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