In the semiconductor manufacturing field, the precision and stability of wafer handling equipment directly determine the yield and efficiency of chip production. Huzhou Prim Semiconductor Co., Ltd. (hereinafter referred to as "Prim") is an innovative enterprise in the domestic semiconductor equipment sector. By leveraging breakthroughs in core technologies such as wafer transfer systems, wafer calibrators, wafer loading systems, and air-floating rotating shafts, Prim is gradually becoming a technical benchmark in the industry. 

Wafer transfer system: The cornerstone of high-precision transmission 

The wafer transfer system is the "blood vessel" that connects various processes in the semiconductor production line. Its core function is to achieve the non-destructive transmission of wafers in a vacuum environment. Prim's transfer system adopts a modular design. Through the precise cooperation between the mechanical arm and the guide rails, it can complete the fully automatic transportation of wafers from storage boxes to processing equipment. The real-time positioning sensors installed in the system can achieve a repeat positioning accuracy of ±0.01mm, ensuring that the wafers are not affected by vibration and contamination during the transmission process. In addition, this system supports parallel processing of multiple wafer boxes (FOUP), significantly increasing the throughput of the production line. 

Wafer Calibrator: The Guardian of Micron-Level Alignment 

The wafer aligner is a pre-processing device for key processes such as lithography and etching. Its function is to precisely position the wafer within the coordinate system of the processing equipment. Prim's aligner employs a technology that combines optical imaging with AI algorithms. It captures the edge features of the wafer using a high-resolution camera and uses a machine learning model to real-time correct positional deviations. This device can complete wafer alignment in 0.5 seconds, with an alignment accuracy of ±0.5 μm, meeting the requirements of 7nm and below process technologies. Its unique "two-axis compensation" design can also automatically correct positioning errors caused by wafer warping, significantly improving the processing yield of complex wafer structures. 

Wafer loading system: The hub of automated production 

The wafer loading system serves as a bridge connecting wafer storage and processing equipment. Prim's solution achieves seamless connection of wafers from FOUP to the processing chamber through the coordinated control of the mechanical arm and vacuum suction cups. The system employs pneumatic sealing technology to ensure no particle contamination during the transfer process, and it supports automatic switching of multiple wafer boxes, reducing the need for manual intervention. In terms of compatibility, this system can be adapted to the interface standards of mainstream semiconductor equipment manufacturers, thereby reducing the cost of equipment line modification for customers. 

Air flotation rotating shaft: A revolution in non-contact drive technology 

The air-floating rotating shaft is a groundbreaking achievement by Prim in the field of precise motion control. Traditional rotating shafts rely on mechanical bearings, which have problems of friction, wear and vibration. However, Prim's air-floating technology creates a micron-scale air film between the shaft and the bearing through compressed air, achieving non-contact rotation. This design has raised the rotational accuracy to ±0.1 arc seconds, while eliminating the lifespan limitations caused by mechanical wear. In wafer inspection equipment, the application of the air-floating rotating shaft increases the inspection speed by 30% and eliminates the need for regular maintenance, significantly reducing operating costs. 

Technical collaboration: Building the semiconductor equipment ecosystem 

Prim's innovation is not only reflected in a single device, but also in the synergy among its technologies. For instance, the positioning data of the wafer calibrator can be directly fed back to the transfer system, enabling dynamic path optimization; the stability of the air-floating rotating shaft provides a smoother transmission environment for the loading system. This "device-data-algorithm" closed-loop design enables Prim's solutions to demonstrate higher overall efficiency in the customer's production line. 

Industry impact: Facilitating the process of domestic substitution 

As semiconductor manufacturing moves towards higher precision, Prim's technology has been applied to the advanced production lines of several domestic wafer foundries. Its equipment has demonstrated outstanding performance in processes down to 28nm and below, breaking the monopoly of foreign manufacturers in the high-end wafer processing equipment sector. In the future, Prim will continue to focus on precision motion control and automation technologies, contributing to the self-reliance and controllability of the semiconductor industry. 

Conclusion

Huzhou Prim Semiconductor Co., Ltd. has enhanced the precision and efficiency of semiconductor manufacturing through innovations in core technologies such as wafer transfer systems, calibrators, loading systems, and air-floating rotating shafts. This not only boosts the quality and efficiency of semiconductor production but also facilitates the breakthrough of domestic equipment in the high-end market. In the context of intensified global competition in the semiconductor industry, Prim's technological approach provides a replicable innovative model for the industry.