As semiconductor manufacturing progresses towards 3nm and lower process technologies, the processing accuracy of wafers has been enhanced to the nanometer level, presenting unprecedented challenges to equipment performance. Huzhou PrimTech Semiconductor Co., Ltd., relying on its independently developed core equipment such as precision motion platforms, ceramic wafer forks, air-floating rotating shafts, and wafer calibrators, has established a complete nanometer-level technology matrix. This not only fills the gap in domestic high-end semiconductor equipment but also drives global semiconductor manufacturing towards higher precision and efficiency. 

Precision Motion Platform: The Foundation of Nanometer-Level Accuracy 

The precision motion platform is the core equipment for wafer handling and positioning in semiconductor manufacturing. Its design directly affects the accuracy of wafers in key processes such as lithography and etching. The precision motion platform of Prim Semiconductor adopts high-precision rails, drive systems, and intelligent control systems. It adjusts the wafer position through precise linear and rotational movements to ensure the repeat positioning accuracy reaches the micrometer level. Its innovative design includes: 

Modular structure: Facilitates quick replacement and upgrade, suitable for various process requirements. 

Intelligent control system: Integrates AI algorithms to achieve real-time monitoring and adaptive adjustment, enhancing production efficiency. 

Application of environmental-friendly materials: Utilizing lightweight and low-friction coefficient materials to reduce energy consumption and pollution. 

This equipment is widely used in high-end fields such as lithography machines and testing equipment, providing stable support for wafer processing. It avoids vibrations or deviations during transportation, significantly improving the yield of chips. 

Ceramic wafer fork: A highly durable and pollution-free handling tool 

During the wafer handling process, the material that directly contacts the wafer must possess both high wear resistance and chemical stability. The ceramic wafer fork of Prim uses high-purity alumina or silicon nitride as its material, and has the following advantages: 

Excellent wear resistance: The hardness exceeds that of metal materials, effectively preventing the wafer from being scratched. 

Anti-pollution property: Resistant to changes in high temperature and acidic/alkaline environments, reducing the risk of contamination on the wafer surface. 

Lightweight design: Reduces equipment load and enhances overall production efficiency. 

The fork body design supports various wafer sizes (ranging from 125mm to 300mm), and through ergonomic optimization, it reduces operational errors, becoming an indispensable component in semiconductor production lines. 

Air-float rotating shaft: A revolution in non-contact motion 

The air-float rotating shaft achieves non-contact movement based on the principles of aerodynamics. By adjusting the airflow to form an air film, the platform surface is suspended, significantly reducing frictional resistance. Its core advantages include: 

Nanometer-level precision: Supports sub-micron-level positioning, meeting the requirements of 3nm manufacturing process. 

Stability and Lifespan: Reduces heat and wear, extends the service life of the equipment. 

Intelligent integration: Combining sensors with feedback systems to achieve highly responsive motion control. 

This technology is widely applied in wafer alignment and positioning, replacing the traditional mechanical solutions and becoming a standard feature of modern production lines. 

Wafer Calibrator: The Guardian of Alignment Accuracy 

The wafer aligner is a crucial device that ensures precise alignment of the wafer during processes such as lithography and etching. Prim's aligner enhances its performance through the following innovations: 

High-precision optical system: Utilizing image processing technology to detect feature points and achieving sub-micron alignment. 

Real-time feedback control: Adjust the position of the motion platform based on sensor data to ensure the stability of the wafer. 

Software platform support: Users can flexibly adjust the calibration parameters to adapt to different wafer sizes and materials. 

The accuracy of the calibrator directly affects the yield of the chips. Prim has provided reliable support for semiconductor manufacturing by continuously optimizing optical and motion control technologies. 

Huzhou Prim Semiconductor: Technology Leadership and Industry Empowerment 

As a global leading provider of wafer processing solutions, Prim Semiconductor has built a complete nanoscale technology matrix through independent research and development, covering precision motion tables, ceramic fork arms, air-floating rotating shafts and wafer calibrators. The company focuses on customer needs and promotes modular, intelligent and environmentally friendly designs, significantly enhancing production efficiency and safety. For instance, its wafer handling manipulator uses an intelligent control system for real-time monitoring, reducing the risk of human operation; the precision motion table optimizes the handling path through AI algorithms, reducing energy consumption. 

Prim's technological innovations not only filled the gap in domestic high-end equipment, but also pushed the global semiconductor manufacturing towards higher precision. In the future, the company will continue to focus on cutting-edge technologies, such as quantum computing and AI integration, to provide efficient, flexible and intelligent solutions for the industry, helping the semiconductor industry continuously break through technological limits.