Deepening expertise in precision motion core technologies, Huzhou Prim Semiconductor empowers the advancement of domestic semiconductor equipment.

As semiconductor manufacturing continues to push the boundaries of nanometer-level precision, every micron-scale error control directly determines the upper limit of chip yield. Founded in 2023, Huzhou Prim Semiconductor Co., Ltd., based in Sian Town, Changxing County, Huzhou City, Zhejiang Province, within the West Lake Science and Technology Innovation Park, has from its inception focused on independently developing core components for precision motion systems in semiconductors. The company has consistently advanced in key areas such as precision motion stage design, wafer calibrators, and air-floating rotary axes, injecting vital technological momentum into the self-reliance and controllability of China's semiconductor equipment industry chain. 

As the "skeleton" of semiconductor manufacturing equipment, the design capability of precision motion stages directly determines the equipment's motion accuracy and stability. The R&D team at Huzhou Prim Semiconductor broke free from traditional path dependencies in their design process, independently mastering the entire chain—from mechanical modeling and material selection to motion control algorithms. To meet the high cleanliness and vibration suppression requirements of semiconductor cleanrooms, the team conducted multiple rounds of topology optimization on the structural rigidity of the motion stage, increasing its deformation resistance by over 40% while maintaining lightweight characteristics. Additionally, based on real-world operating conditions in semiconductor production lines, they developed customized multi-axis coordinated motion control logic, effectively reducing trajectory deviations during high-speed operations. This enables the motion stage to maintain nanometer-level positioning stability even during long-distance reciprocating movements, making it highly adaptable to equipment needs across front-end processes such as lithography, etching, and thin-film deposition. 

As a key upstream component in semiconductor automated production lines, the wafer calibrator is a core device ensuring consistent orientation for every wafer before it enters the process chamber. The self-developed wafer calibrator from Huzhou Prim Semiconductor integrates non-contact optical inspection, high-precision edge fitting, and dynamic optimization technologies. Utilizing a high-resolution CCD sensor combined with an LED parallel light source, it non-invasively scans the complete edge profile of the wafer. Based on the least squares method, it performs geometric circle fitting to rapidly calculate the wafer's center eccentricity, while accurately identifying the notch or flat features to determine the crystallographic reference angle. To address the common issue of residual vibration during chuck start-stop operations in the industry, the team optimized the motion control velocity curve based on the dynamic characteristics of the calibrator’s chuck, effectively suppressing vibration disturbances caused by high-speed rotation. This enhancement achieves micrometer-level calibration accuracy, with single-wafer calibration time controlled within seconds. The system is compatible with mainstream silicon wafers of 6-inch, 8-inch, and 12-inch sizes, and can also accommodate special workpieces such as glass substrates and quartz masks, fully meeting the high-throughput requirements of semiconductor automated production lines. 

As the core actuator of precision motion stages, the air-floating rotary axis serves as a key support for achieving ultra-smooth rotational motion. Huzhou Prim Semiconductor has overcome critical technologies in the development of this air-floating rotary axis, including micron-level control of air gap uniformity and optimization of high-pressure gas flow fields. This enables the rotary axis to operate entirely without mechanical contact, fundamentally eliminating friction losses associated with traditional mechanical shafts, and thus achieving extremely low runout and exceptional stability during rotation. The self-developed air-floating rotary axis maintains stable motion accuracy over extended periods, with maintenance intervals significantly longer than those of conventional mechanical shaft solutions. It can be integrated as an independent component into various precision inspection equipment or directly incorporated into the company's proprietary precision motion stages and wafer calibrators, forming a complete closed-loop core component technology system. 

From technological breakthroughs in core components to integrated innovation in overall solutions, Huzhou Prim Semiconductor is steadily building a comprehensive product system covering the entire precision motion chain through solid R&D efforts. Going forward, the company will continue to focus on addressing technical challenges in semiconductor precision motion, and by embracing an industry philosophy of compliant innovation and collaborative advancement, work hand-in-hand with partners across the supply chain to continuously contribute to the high-quality development of domestic semiconductor equipment.