In the process of semiconductor manufacturing moving towards 3nm and below process technologies, the precision requirements for wafer handling, alignment, and positioning have been raised to the nanometer level. Huzhou PrimTech Semiconductor Co., Ltd. has built a complete nanometer-level technology matrix through its independently developed air-floating rotating shafts, wafer alignment tables, precise motion tables, and wafer handling manipulators, filling the gap in domestic high-end semiconductor equipment and promoting the global semiconductor manufacturing towards higher precision and efficiency.

Air-floating rotating shaft: The cornerstone of nanometer-level precision

The air-floating rotating shaft is one of the core components of PrimTech's technology system. It uses compressed gas to form an even air film between the shaft and the bearing, achieving true zero-contact operation, fundamentally eliminating the friction and wear problems of traditional mechanical bearings. This design enables the rotating shaft to have the following advantages: nanometer-level positioning accuracy: the friction-free characteristic avoids the sliding effect, and the movement trajectory can be precisely controlled at the nanometer level;

Theoretical infinite lifespan: no physical contact means almost zero wear, and the equipment lifespan is significantly extended;

High cleanliness compatibility: no lubricants are required, eliminating oil contamination, and perfectly adapting to the dust-free environment of semiconductor manufacturing.

In scenarios such as lithography machines and wafer inspection equipment, the air-floating rotating shaft provides a stable foundation for precise rotational motion, ensuring the absolute stability of the wafer during the processing.

Wafer alignment table: A breakthrough in micrometer-level precision

The wafer alignment table is another breakthrough technology of PrimTech. It achieves wafer suspension without contact through an air-floating support system, combined with high-precision sensors and closed-loop control algorithms, and can adjust the wafer position in real time to ensure alignment accuracy at the micrometer level. The core innovation of this system includes:

Air film thickness closed-loop control: sensors monitor the air film thickness (typically controlled at 50-100 μm) to ensure consistency of the suspension height;

Multi-degree-of-freedom leveling mechanism: fine-threaded support rods are used to achieve micrometer-level height adjustment, effectively resisting stress deformation during equipment operation;

Modular design: the air-floating system, support system, and control system are independent of each other, facilitating maintenance and upgrades.

In processes such as wafer bonding and lithography alignment, this technology significantly improves yield and production efficiency.

Precise motion table: A mechanical arm with nanometer-level positioning

The precise motion table is the key for PrimTech to achieve full-process automation of wafer handling. It uses air-floating guide rails and linear motor drives, combined with a high-rigidity marble base, to achieve

±0.1 μm positioning accuracy: through dynamic adjustment of the air film and laser interferometer calibration, ensuring the absolute accuracy of the movement trajectory;

Anti-interference stability: the air film can absorb 90% or more of external vibrations, ensuring the stable operation of the equipment in a micrometer-level working environment;

Multi-scenario adaptability: supports the entire process integration from wafer transfer to inspection equipment, significantly improving the efficiency of semiconductor production lines.

Wafer handling manipulator: An efficient and clean automated solution

In response to the dual requirements of cleanliness and efficiency in wafer manufacturing, PrimTech has developed a wafer handling manipulator. This device uses air-floating transfer technology, achieving wafer transportation without contact through air film support, avoiding particle contamination caused by friction in traditional mechanical hands. Its core characteristics include:

Zero-contact transportation: the air film thickness is controlled at 200-300 μm, ensuring no scratches on the wafer surface;

High-speed response: linear motor drives increase the transportation speed by more than 30%, while maintaining nanometer-level repeat positioning accuracy;

Intelligent sensor integration: built-in air film thickness sensors and visual positioning systems enable automatic alignment and grasping.

The synergy of the technology matrix: PrimTech's path to domestic substitution

PrimTech has constructed a precise equipment system covering the entire process of wafer manufacturing through the collaborative design of the air-floating rotating shaft, wafer alignment platform, precision motion platform, and handling manipulator. For instance, in the wafer inspection equipment, the handling manipulator moves the wafer from the storage box to the docking station;

The precision motion platform transports the wafer to the inspection position;

The wafer alignment platform dynamically calibrates the wafer angle;

After the inspection is completed, the air-floating rotating shaft adjusts the wafer to the position for the next process.

This technical matrix not only breaks through the monopoly of international manufacturers in high-end semiconductor equipment, but also provides a more cost-effective long-term solution for semiconductor manufacturing with its characteristics of "zero friction, zero wear, and zero pollution". 

Conclusion: From Nanotechnology to the Precision Revolution of the Future

From the nanometer-level precision of the air-floating rotating shaft to the fully automated wafer handling manipulator, PrimTech has defined the new standards for semiconductor equipment through independent innovation. Its technology not only enhances the yield of 3nm and below processes but also gives China's semiconductor industry a voice in the field of high-precision manufacturing. As semiconductor technology continues to evolve towards smaller nodes, PrimTech's air-floating technology matrix will continue to lead the revolution in precision manufacturing.